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InAs/GaSb superlattice focal plane arrays for high-resolution thermal imaging

InAs/GaSb Übergitter-Matrixdetektoren für hochauflösende Thermographie
 
: Rehm, R.; Walther, M.; Schmitz, J.; Fleißner, J.; Fuchs, F.; Ziegler, J.; Cabanski, W.

:

Rogalski, A. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.; Society of Photo-Optical Instrumentation Engineers -SPIE-, Europe, Cardiff:
Infrared Photoelectronics : 30 - 31 August 2005, Warsaw, Poland; Proceedings of the Conference on Infrared Photoelectronics (IPH), part of the International Congress on Optics and Optoelectronics
Bellingham/Wash.: SPIE, 2005 (SPIE Proceedings Series 5957)
ISBN: 0-8194-5964-X
pp.40-47
Conference on Infrared Photoelectronics <2005, Warschau>
International Congress on Optics and Optoelectronics <2005, Warschau>
English
Conference Paper
Fraunhofer IAF ()
infrared; Infrarot; focal plane array; Bildfeldmatrix; superlattice; Übergitter; GaSb; thermal imaging; Thermographie

Abstract
The first fully operational mid-IR (3-5 µm) 256x256 IR-FPA camera system based on a type-II InAs/GaSb short-period superlattice showing an excellent noise equivalent temperature difference below 10 mK and a very uniform performance has been realized. We report on the development and fabrication of the detector chip, i.e., epitaxy, processing technology and electro-optical characterization of fully integrated InAs/GaSb superlattice focal plane arrays. While the superlattice design employed for the first demonstrator camera yielded a quantum efficiency around 30%, a superlattice structure grown with a thicker active layer and an optimized V/III BEP ratio during growth of the InAs layers exhibits a significant increase in quantum efficiency. Quantitative responsivity measurements reveal a quantum efficiency of about 60% for InAs/GaSb superlattice focal plane arrays after implementing this design improvement.

: http://publica.fraunhofer.de/documents/N-34019.html