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Structure, properties and applications of diamond-like carbon coatings prepared by reactive magnetron sputtering

: Bewilogua, K.; Brand, J.; Thomsen, H.; Weber, M.; Wittorf, R.

Zeitschrift für Metallkunde 96 (2005), No.9, pp.998-1004
ISSN: 0044-3093
ISSN: 0179-4841
Journal Article
Fraunhofer IST ()
Magnetronzerstäubung; diamantähnlicher Kohlenstoff; reaktive Magnetronzerstäubung; Reibungskoeffizient; Verschleißfestigkeit; Abrasivverschleiß; Vickershärte; Transmissionselektronenmikroskopie; Sekundärionen-Massenspektrometrie; Raman; Elektronenmikrosondenanalyse; Bruchgefüge; Mikrostruktur

Metal containing and metal free amorphous diamond-like carbon films were prepared by reactive magnetron sputter deposition using targets from transition metals or graphite and acetylene as reactive gas. Both types of coating materials are well known for their low friction coefficients. However, metal containing films exhibit clearly lower wear resistances and lower hardness values than metal free films. To study the differences between both materials, tungsten containing and metal free coatings were compared. The deposition experiments were carried out in an industrial scale d.c. magnetron sputter machine. Transmission electron microscopy, secondary ion mass spectroscopy, and Raman spectroscopy as well as hardness measurements and wear tests were performed to characterize and to compare composition, structure, mechanical, and tribological properties of both coating materials.