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Verfahren zum Herstellen einer photovoltaischen Solarzelle mit einem Heteroübergang

METHOD FOR PRODUCING A PHOTOVOLTAIC SOLAR CELL THAT COMPRISES A HETEROJUNCTION AND A DOPING REGION INTRODUCED BY DIFFUSION ON TWO DIFFERENT SURFACES
 
: Feldmann, Frank; Hermle, Martin

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Frontpage ()

DE 102013219564 A1: 20130927
German
Patent, Electronic Publication
Fraunhofer ISE ()

Abstract
The invention relates to a method for producing a photovoltaic cell having at least one doping region (e) introduced by diffusion and at least one heterojunction, comprising the following steps: A) providing a semiconductor substrate (1) having base doping; B) producing at least one doping region (e) on a first side of the semiconductor substrate by diffusing a dopant into the semiconductor substrate, which doping region (e) has higher doping than the base doping and/or a doping type opposite the doping type of the base doping, and producing a heterojunction on a second side of the semiconductor substrate (1) opposite the first side, which heterojunction is formed with a doped heterojunction layer (b) and a dielectric tunnel layer (a) arranged indirectly or directly between the heterojunction layer (b) and the semiconductor substrate (1). The invention is characterized in that, in step B, the tunnel layer (a) and the heterojunction layer (b) are applied before the doping region (e) is introduced by diffusion and in that simultaneously the doped heterojunction layer is activated and the dopant is diffused into the doping region (e) by heating the solar cell in step B.

: http://publica.fraunhofer.de/documents/N-337528.html