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Title
Verfahren zum Herstellen einer photovoltaischen Solarzelle mit zumindest einem Heteroübergang
Date Issued
2015
Author(s)
Feldmann, Frank
Patent No
102013219561
Abstract
WO15044070A1 [EN] The invention relates to a method for producing a photovoltaic solar cell having at least one heterojunction, comprising the following steps: A) providing a semiconductor substrate having base doping; B) producing a heterojunction on at least one side of the semiconductor substrate, which heterojunction has a doped heterojunction layer and a dielectric tunnel layer arranged indirectly or directly between the heterojunction layer and the semiconductor substrate; C) heating at least the heterojunction layer in order to improve the electrical quality of the heterojunction. The invention is characterized in that, in a step D after step C, hydrogen is diffused into the heterojunction layer and/or to the interface between the tunnel layer and the semiconductor substrate.
Language
de
Patenprio
DE 102013219561 A1: 20130927