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Coatings for the next generation micro mechanical mirrors

: Gatto, A.; Yang, M.; Kaiser, N.

Optical Society of America -OSA-, Washington/D.C.; European Optical Society -EOS-; Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Optical interference coatings 2004. CD-ROM : 9th topical meeting and tabletop exhibit ; Tucson, June 27 - July 2, 2004; technical digest
Washington, DC: OSA, 2004
ISBN: 1-557-52775-X
Topical Meeting and Tabletop Exhibit Optical Interference Coatings <9, 2004, Tucson/Ariz.>
Conference Paper
Fraunhofer IOF ()