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Numerical simulation of microwave field distribution for bifocal plasma sources
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2005
Conference Paper
Titel
Numerical simulation of microwave field distribution for bifocal plasma sources
Author(s)
Graf, M.
Räuchle, E.
Urban, H.
Kaiser, M.
Alberts, L.
Emmerich, R.
Elsner, P.
Hauptwerk
Plasma surface engineering, PSE 2004
Konferenz
International Conference on Plasma Surface Engineering (PSE) 2004
DOI
10.1016/j.surfcoat.2005.01.073
Language
English
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Fraunhofer-Institut für Chemische Technologie ICT