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Numerical simulation of microwave field distribution for bifocal plasma sources

 
: Graf, M.; Räuchle, E.; Urban, H.; Kaiser, M.; Alberts, L.; Emmerich, R.; Elsner, P.

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Plasma surface engineering, PSE 2004 : Proceedings of the Ninth International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, September 13 - 17, 2004
Amsterdam: Elsevier, 2005 (Surface and coatings technology 200.2005,1/4)
pp.904-908
International Conference on Plasma Surface Engineering (PSE) <9, 2004, Garmisch-Partenkirchen>
English
Conference Paper, Journal Article
Fraunhofer ICT ()

: http://publica.fraunhofer.de/documents/N-33511.html