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Nanofocus CT - A New Dimension in Radioscopic Inspection on Micro Materials

: Hanke, R.; Baumbach, T.

Michel, B.; Winkler, T.; Werner, M.; Fecht, H.-J. ; Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration -IZM-, Berlin; Deutscher Verband für Materialforschung und -prüfung e.V. -DVM-, Berlin:
MicroMat 2000. Proceedings 3rd International Conference and Exhibition Micro Materials : April 17 - 19, 2000, Berlin, Germany
Dresden: ddp Goldenbogen, 2000
ISBN: 3-932434-15-3
Micro Materials (Micro Mat) <3, 2000, Berlin>
Conference Paper
Fraunhofer IZFP ()
Fraunhofer IIS A ( Fraunhofer IIS-A) ()
target; x-ray tomography; synchrotron

The state of the art in the field of nondestructive testing by X-ray technology related on spatial resolution is up to now given by so called open tube systems, i.e. systems in which the essential beam producing components like target or filament are rendered accessible by venting the tube.
The X-ray bremsstrahlung is created by impact of accelerated electrons focused on a target plane, which emit about 1 % of their kinetic energy (some 10 keV) during deceleration within the target. The ermitted X-rays have a maximum energy limited by the maximum kinetic energy of the decelerated electrons. The rest of the electron energy is converted to heat which has to be dissipated via the target carrier.