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Nanoscale characterization of high-k dielectrics by electrical SPM methods

Presentation held at Novel High k Application Workshop, March 24, 2014, Dresden
 
: Rommel, Mathias

:
presentation urn:nbn:de:0011-n-3330611 (2.0 MByte PDF)
MD5 Fingerprint: b70c47aec212ebd9f71931bcb4f7aa0f
Created on: 9.4.2015


2014, 23 Folien
Novel High k Application Workshop <2014, Dresden>
English
Presentation, Electronic Publication
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-333061.html