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Spatially resolved contrast measurement of diffractive micromirror arrays

 
: Sicker, Cornelius; Heber, Jörg; Berndt, Dirk; Rückerl, Florian; Tinevez, Jean-Yves; Shorte, Spencer; Wagner, Michael; Schenk, Harald

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Fulltext urn:nbn:de:0011-n-3321739 (2.2 MByte PDF)
MD5 Fingerprint: 46ea0c20fbac80ae259f39b93b192121
Copyright Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Created on: 6.5.2015


Piyawattanametha, W. (Ed.) ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and Miniaturized Systems XIV : 7 - 12 February 2014, San Francisco, California, USA
Bellingham, WA: SPIE, 2015 (Proceedings of SPIE 9375)
ISBN: 978-1-62841-465-3
Paper 93750D, 10 pp.
Conference "MOEMS and Miniaturized Systems" <14, 2015, San Francisco/Calif.>
English
Conference Paper, Electronic Publication
Fraunhofer IPMS ()

Abstract
Diffractive micromirror arrays (MMA) are a special class of optical MEMS, serving as spatial light modulators (SLM) that control the phase of reflected light. Since the surface profile is the determining factor for an accurate phase modulation, high-precision topographic characterization techniques are essential to reach highest optical performance. While optical profiling techniques such as white-light interferometry are still considered to be most suitable to this task, the practical limits of interferometric techniques start to become apparent with the current state of optical MEMS technology. Light scatter from structured surfaces carries information about their topography, making scatter techniques a promising alternative. Therefore, a spatially resolved scatter measurement technique, which takes advantage of the MMA’s diffractive principle, has been implemented experimentally. Spectral measurements show very high contrast ratios (up to 10 000 in selected samples), which are consistent with calculations from micromirror roughness parameters obtained by white-light interferometry, and demonstrate a high sensitivity to changes in the surface topography. The technique thus seems promising for the fast and highly sensitive characterization of diffractive MMAs.

: http://publica.fraunhofer.de/documents/N-332173.html