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Reel-to-reel fabrication of integrated circuits based on soluble polymer semiconductor

 
: Klink, G.; Hammerl, E.; Drost, A.; Hemmetzberger, D.; Bock, K.

:

Institute of Electrical and Electronics Engineers -IEEE-:
Polytronic 2005, 5th International Conference on Polymers and Adhesives in Microelectronics and Photonics. Proceedings : Hotel Mercure Panorama, Wroclaw, Poland 23-26 October 2005
New York, NY: IEEE, 2005
ISBN: 0-7803-9553-0
6 pp.
International Conference on Polymers and Adhesives in Microelectronics and Photonics (Polytronic) <5, 2005, Wroclaw>
English
Conference Paper
Fraunhofer IZM ()
reel-to-reel manufacturing; organic electronic; polymer integrated circuit; low-cost electronic

Abstract
Within this work a process for manufacturing integrated circuits based on solution processed polymer semiconductors has been developed. Basis is a reel-to-reel working photolithographic patterning process for metallized foils, which is used to fabricate the basic source-drain layer with high resolution. By two subsequent lacquering and three screen printing steps polymer field effect transistors are integrated to circuits.

: http://publica.fraunhofer.de/documents/N-33196.html