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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Microflex: A New Technique for Hybrid Integration for Microsystems

 
: Beutel, H.-J.; Stieglitz, T.; Meyer, J.-U.

Institute of Electrical and Electronics Engineers -IEEE-; IEEE Robotics and Automation Society:
Micro Electro Mechanical Systems 1998
Piscataway, NJ: IEEE, 1998
ISBN: 0-7803-4412-X
pp.306-311
International Workshop on Micro Electro Mechanical Systems (MEMS) <11, 1998, Heidelberg>
English
Conference Paper
Fraunhofer IBMT ()

: http://publica.fraunhofer.de/documents/N-330562.html