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Packaging and characterization of miniaturized spectral sensing devices
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2004
Conference Paper
Titel
Packaging and characterization of miniaturized spectral sensing devices
Author(s)
Otto, T.
Saupe, R.
Stock, V.
Fritzsch, U.
Bruch, R.
Gessner, T.
Hauptwerk
MOEMS and miniaturized systems IV
Konferenz
Conference "MOEMS and Miniaturized Systems" 2004
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM