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Micro optical devices for light modulation and deflection

: Schenk, H.; Sandner, T.; Lakner, H.

Zengerle, R. ; Bundesministerium für Bildung und Forschung -BMBF-; Verband der Elektrotechnik, Elektronik, Informationstechnik -VDE-; VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-:
Mikrosystemtechnik Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg
Berlin: VDE-Verlag, 2005
ISBN: 3-8007-2926-1
ISBN: 978-3-8007-2926-5
Mikrosystemtechnik Kongress <2005, Freiburg>
Conference Paper
Fraunhofer IPMS ()

Micro Scanning Mirrors for light deflection and large scale integrated Micro Mirror Arrays for light modulation were designed and fabricated. Single mirrors, resonantly respectively quasistatically operated are used for applications like barcode reading, laser projection displays, spectroscopy and laser beam positioning. A basic process with various options allows fabricating devices meeting the application specific requirements. E. g. high reflective coatings or gratings can be realized. Key properties of the devices are low driving voltage, high shock resistivity and excellent long run behaviour.
Large scale integrated Micro Mirror Arrays with up to 1 million individually addressable pixels serve as high dynamic programmable mask in DUV-microlithography as well as for wave front correction applications. Frame rates of up to 2 kHz are achieved with 63 grey levels.