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Integrated investigation approach for determining mechanical properties of poly-silicon membranes

: Brueckner, J.; Dehe, A.; Auerswald, E.; Dudek, R.; Michel, B.; Rzepka, S.

Postprint (PDF; )

Procedia Engineering 87 (2014), pp.879-882
ISSN: 1877-7058
European Conference on Solid-State Transducers (Eurosensors) <28, 2014, Brescia>
Journal Article, Conference Paper, Electronic Publication
Fraunhofer ENAS ()

A methodology is presented for determining mechanical properties of free-standing thin films such as poly-silicon membranes. The integrated investigation approach comprises test structure development, mechanical testing, and numerical simulation. All membrane test structures developed and manufactured consist of the same material but have different stiffness due to variations in the geometric design. The mechanical tests apply microscopic loads utilizing a nanoindentation tool. Young's modulus and fracture strength of the poly-silicon films are deduced from the force-displacement curves recorded during the tests by means of finite element analysis.