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Modelling and testing of mechanical stresses by means of stress chips for the MERGE project
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2014
Book Article
Titel
Modelling and testing of mechanical stresses by means of stress chips for the MERGE project
Author(s)
Rost, F.
Schindler-Saefkow, Florian
Vogel, D.
Rzepka, Sven
Michel, Bernd
Hauptwerk
Smart systems integration for micro- and nanotechnologies
Language
English
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Fraunhofer-Institut für Elektronische Nanosysteme ENAS