English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Investigation of a new AC power supply for deposition of highly insulating alumina films
Details
Full
Export
Statistics
Options
2014
Conference Paper
Titel
Investigation of a new AC power supply for deposition of highly insulating alumina films
Author(s)
Carreri, F.C.
Bandorf, R.
Gerdes, H.
Bräuer, G.
Hauptwerk
RSD 2014, Reactive Sputter Deposition Symposium
Konferenz
Reactive Sputter Deposition Symposium (RSD) 2014
Language
English
google-scholar
View Details
Fraunhofer-Institut fĂ¼r Schicht- und Oberflächentechnik IST