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An asymmetry of conduction mechanisms and charge trapping in thin high-k Hf(x)Ti(y)Si(z)O films
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2005
Journal Article
Titel
An asymmetry of conduction mechanisms and charge trapping in thin high-k Hf(x)Ti(y)Si(z)O films
Author(s)
Paskaleva, A.
Bauer, A.J.
Lemberger, M.
Zeitschrift
Journal of applied physics
DOI
10.1063/1.2039270
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB