English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors
Details
Full
Export
Statistics
Options
2004
Conference Paper
Titel
Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors
Author(s)
Lemberger, M.
Paskaleva, A.
Zurcher, S.
Bauer, A.J.
Frey, L.
Ryssel, H.
Hauptwerk
13th Biennial Conference on Insulating Films on Semiconductors 2003. Proceedings
Konferenz
Biennial Conference on Insulating Films on Semiconductors (INFOS) 2003
DOI
10.1016/j.mee.2004.01.010
Language
English
google-scholar
View Details
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB