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Electrical characterization and reliability aspects of zirconium silicate films obtained from novel MOCVD precursors

 
: Lemberger, M.; Paskaleva, A.; Zurcher, S.; Bauer, A.J.; Frey, L.; Ryssel, H.

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Morante Lleonart, J.R.:
13th Biennial Conference on Insulating Films on Semiconductors 2003. Proceedings : June 18 - 20, 2003, Barcelona, Spain: The 13th Biannual Conference on Insulating Films on Semiconductors, INFOS 2003
Amsterdam: Elsevier, 2004 (Microelectronic engineering 72.2004,1/4)
pp.315-320
Biennial Conference on Insulating Films on Semiconductors (INFOS) <13, 2003, Barcelona>
English
Conference Paper, Journal Article
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-32530.html