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Conduction mechanisms and an evidence for phonon-assisted conduction process in thin high-k Hf(x)Ti(y)Si(z)O films

 
: Paskaleva, A.; Bauer, A.; Lemberger, M.

:

Microelectronics reliability 45 (2005), No.7-8, pp.1124-1133
ISSN: 0026-2714
English
Journal Article
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-32526.html