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MOCVD of cunductive cubic HfN thin films from Hf(NR2)4 and N,N-dimethylhydrazine

 
: Kim, Y.; Parala, H.; Bauer, A.J.; Lemberger, M.; Baunemann, A.; Fischer, R.A.

Devi, A. ; Electrochemical Society -ECS-, High Temperature Materials Division:
Fifteenth European Conference on Chemical Vapor Deposition, EUROCVD-15. Proceedings : held from 5th to 9th September 2005 in Bochum, Germany
Pennington, NJ: ECS, 2005 (Electrochemical Society. Proceedings 2005-9)
ISBN: 1-566-77427-6
pp.762-766
European Conference on Chemical Vapor Deposition (EUROCVD) <15, 2005, Bochum>
English
Conference Paper
Fraunhofer IISB ()

: http://publica.fraunhofer.de/documents/N-32522.html