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MOCVD of cunductive cubic HfN thin films from Hf(NR2)4 and N,N-dimethylhydrazine
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2005
Conference Paper
Titel
MOCVD of cunductive cubic HfN thin films from Hf(NR2)4 and N,N-dimethylhydrazine
Author(s)
Kim, Y.
Parala, H.
Bauer, A.J.
Lemberger, M.
Baunemann, A.
Fischer, R.A.
Hauptwerk
Fifteenth European Conference on Chemical Vapor Deposition, EUROCVD-15. Proceedings
Konferenz
European Conference on Chemical Vapor Deposition (EUROCVD) 2005
Language
English
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Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB