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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Sidewall Damage Analysis of Low-k Dielectricmaterial by Using Energy-Filtered Transmission Electron Microscopy

 
: Singh, P.K.; Zimmermann, S.; Waechtler, T.; Schulze, Steffen; Schulz, S.E.; Hietschold, Michael

MAM 2014, Workshop on "Materials for Advanced Metallization". CD-ROM : Held in Chemnitz, Germany, from March 2-5, 2014, Annual Workshop Devoted to Materials Research, Materials Properties and Interactions
Chemnitz: Technische Universität Chemnitz, 2014
Workshop on "Materials for Advanced Metallization" (MAM) <23, 2014, Chemnitz>
English
Conference Paper
Fraunhofer ENAS ()

: http://publica.fraunhofer.de/documents/N-323783.html