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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Design of a micro-optical low coherent interferometer array for the characterisation of MEMS and MOEMS

 
: Gastinger, K.; Haugholt, K.H.; Røyset, A.; Albero, J.; Zeitner, U.; Gorecki, C.

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Osten, W:
Fringe 2009, 6th International Workshop on Advanced Optical Metrology : 14.-16.9.2009, Nürtingen, Germany
Berlin: Springer, 2009
ISBN: 978-3-642-03050-5
pp.611-617
Fringe, International Workshop on Advanced Optical Metrology <6, 2009, Nürtingen>
English
Conference Paper
Fraunhofer IOF ()

: http://publica.fraunhofer.de/documents/N-323467.html