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Development of a Process Chain for Silicon Carbide Mirrors
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2013
Conference Paper
Titel
Development of a Process Chain for Silicon Carbide Mirrors
Author(s)
Klocke, Fritz
Hünten, Martin
Bletek, Thomas
Wächter, Daniel
Hauptwerk
13th International Conference of the European Society for Precision Engineering and Nanotechnology 2013. Proceedings. Vol.2
Konferenz
European Society for Precision Engineering and Nanotechnology (EUSPEN International Conference) 2013
Language
English
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Fraunhofer-Institut für Produktionstechnologie IPT