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Sputter deposition of piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications

: Barth, Stefan; Glöß, Daniel; Bartzsch, Hagen; Juuti, J.; Gerlach, Gerald; Suchaneck, Günther; Heuer, Henning; Walter, Susan; Herzog, Thomas; Frach, Peter; Palosaari, J.

Schmidt, B. (Tagungsleiter) ; VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik -GMM-:
Energieautarke Sensorik. CD-ROM : Beiträge des Beiträge des 7. GMM Workshops vom 24. bis 25. Februar 2014 in Magdeburg
Berlin: VDE-Verlag, 2014 (GMM-Fachbericht 79)
ISBN: 978-3-8007-3581-5
Workshop Energieautarke Sensorik <7, 2014, Magdeburg>
Conference Paper
Fraunhofer FEP ()
Fraunhofer IKTS ()

This paper reports on the deposition and characterization of highly piezoelectric aluminium nitride (AlN) and aluminium scandium nitride (AlXSc1-XN) thin films. Characterization methods include XRD, SEM, pulse echo and piezoemeter measurements. The deposition of highly piezoelectric AlN films was achieved with deposition rates up to 200 nm/min on a coating diameter of 200 mm. Additionally, the energy harvesting properties of AlN due to ambient mechanical vibrations are demonstrated with a basic cantilever structure of Si with AlN on top. This basic and not optimized design showed a power generation ability of several 10 µW to several 100 µW for an excitation vibration with displacement amplitudes from 2.5 µm to 7.5 µm peak-to-peak and frequencies of around 600 Hz.