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2000
Conference Paper
Titel
Thermographic Testing Methods with High Temporal and Spatial Resolution
Abstract
Microstructures in semiconductors and in ferrite were imaged by pulsed thermography and by thermal wave microscopy. The lateral resolution ranges down to 50 µm for thermoagraphy and 5 µm respectively. The advantage of both techniques is their contact-free operation with ability to obtain sub-surface information.
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