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Synthesis and Deposition of Metal Nanoparticles by Gas Phase Condensation Process

: Glöß, Daniel; Maicu, Marina; Frach, Peter; Schmittgens, Ralph; Hecker, Dominik; Gerlach, Gerald


Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 57th Annual Technical Conference 2014 : Chicago, USA, 03. - 09. Mai 2014
Albuquerque: SVC, 2014
ISBN: 978-1-878068-34-7
Society of Vacuum Coaters (Annual Technical Conference) <57, 2014, Chicago/Ill.>
Conference Paper
Fraunhofer FEP ()
PECVD; photocatalytic; polymers

In this work, a process which allows the production of nanoparticles in a vacuum environment is described. In the deposition machine, metal and inorganic composite particles can be generated through a plasma-based gas phase condensation process, using a modified gas flow sputter source. Besides, the gas phase condensation source is linked to a PECVD unit by a rotating sample holder, so that, by the combination of the two processes, the deposition of nanocomposite coatings consisting of metallic nanoparticles embedded in a thin film matrix material is also possible. The tool was used for the deposition of Pt and Ag nanoparticles onTiO2 thin films in order to improve its photocatalytic activity. Moreover, by embedding Ag nanoparticles in plasma polymers, layers for thin film plasmonic coatings could be fabricated.