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POCL3-based co-diffusion process for N-type back-contact back-junction solar cells

: Keding, R.; Hendrichs, M.; Stüwe, D.; Jahn, M.; Reichel, C.; Borchert, D.; Wolf, A.; Reinecke, H.; Biro, D.

Fulltext urn:nbn:de:0011-n-3112846 (130 KByte PDF)
MD5 Fingerprint: 9f022ec5a285f08b362448c1a56a4108
Created on: 7.11.2014

Bokhoven, T.P. ; European Commission:
29th European Photovoltaic Solar Energy Conference and Exhibition, EU PVSEC 2014 : Proceedings of the international conference held in Amsterdam, The Netherlands, 22 - 26 September 2014, DVD
München: WIP, 2014
ISBN: 3-936338-34-5
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <29, 2014, Amsterdam>
Conference Paper, Electronic Publication
Fraunhofer ISE ()
PV Produktionstechnologie und Qualitätssicherung; Silicium-Photovoltaik; Pilotherstellung von industrienahen Solarzellen; n-type; contact; Co-Diffusion

Back-contact back-junction (BC-BJ) solar cells have been developed to meet the following objectives: process simplification by POCl3 based co-diffusion steps and efficiency improvement independent of the co-diffusion setup. In general, the process sequence is industrially feasible, requires not more than one temperature step (co-diffusion), and implements only industrially available patterning technologies. The process simplification is obtained by introducing a sophisticated co-diffusion process which combines solid diffusion sources with POCl3. Compared with BC-BJ cells featuring solid diffusion sources at the front side, the number of process steps could be decreased. Solar cells based on this process simplification feature conversion efficiencies up to 20.5 %. The efficiency improvement is obtained by integrating an improved B-source, by adjusting the material properties and by changing the pattern of the contact openings. BC-BJ cells based on the latter cell improvements feature conversion efficiencies up to 21.6 %. The efficiency improvement is transferable to cells based on the regarded process simplification featuring POCl3 as gaseous diffusion source.