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EUV and soft X-ray multilayer optics
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2004
Conference Paper
Titel
EUV and soft X-ray multilayer optics
Author(s)
Kaiser, N.
Yulin, S.
Feigl, T.
Bernitzki, H.
Lauth, H.
Hauptwerk
Advances in optical thin films
Konferenz
Conference "Advances in Optical Thin Films" 2003
DOI
10.1117/12.512502
Language
English
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Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF