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Title
Mikromechanische Resonatorandordnung
Date Issued
2014
Author(s)
Hofmann, Ulrich
Janes, Joachim
Patent No
102012222988
Abstract
US2014159827A The invention relates to a micromechanical resonator arrangement, in particular micro-mirror scanner with an inner actuator, which comprises an oscillation body capable of oscillation about at least one axis, and with an outer actuator with an oscillating part. The inner and outer actuator form a coupled oscillation system, and the outer actuator is driven by an external drive whose drive frequency is selected in a manner such that the oscillation body of the inner actuator oscillates with one of its eigenmodes or close to this eigenmode. The inner actuator is at least one vacuum-encapsulated micro-actuator chip which is fastened on the oscillating part of the outer actuator.
Language
de
Patenprio
DE 102012222988 A1: 20121212