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UV-Lichtquelle mit kombinierter Ionisation und Bildung von Excimern

UV LIGHT SOURCE HAVING COMBINED IONIZATION AND FORMATION OF EXCIMERS
 
: Elkin, Bentsian; Lohner, Alexander; Egner, Siegfried

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Frontpage ()

DE 102012219064 A1: 20121019
German
Patent, Electronic Publication
Fraunhofer IGB ()

Abstract
The invention relates to a device for producing UV light. Said device provides light from light sources that operate in accordance with different physical principles. The device comprises a chamber having several gas-filled plasma chambers (11, 12), wherein the chamber has at least one area (37, 39) transparent to UV light and/or VUV light. A first group (11) of plasma chambers is filled with an ionizable gas containing mercury and a second group (12) of plasma chambers is filled with a gas that forms excimers when suitably excited.

: http://publica.fraunhofer.de/documents/N-311063.html