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Hartstoffbeschichtete Körper aus Metall, Hartmetall, Cermet oder Keramik sowie Verfahren zur Herstellung derartiger Körper

HARD-MATERIAL-COATED BODIES COMPOSED OF METAL, CEMENTED HARD MATERIAL, CERMET OR CERAMIC AND PROCESSES FOR PRODUCING SUCH BODIES
 
: Endler, Ingolf; Scholz, Sebastian

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Frontpage ()

DE 102011087715 A1: 20111205
German
Patent, Electronic Publication
Fraunhofer IKTS ()

Abstract
The invention relates to hard-material-coated bodies composed of metal, cemented hard material, cermet or ceramic, coated with a TiSiCN composite layer or with a multilayer layer system which contains at least one TiSiCN composite layer, where the TiSiCN composite layer is, according to the invention, a nanocomposite layer which has been produced by means of a thermal CVD process without additional plasma excitation and contains a nanocrystalline phase composed of TiCxN1-x having a crystallite size in the range from 5 nm to 150 nm and a second phase composed of amorphous SiCxNy. The layer according to the invention is characterized by a high hardness, a high oxidation and heat resistance and a high adhesive strength. To produce this TiSiCN nanocomposite layer, the invention comprises a process in which the layer is deposited from a gas mixture containing one or more titanium halides, one or more silicon-containing precursors, hydrogen and reactive compounds having carbon and nitrogen atoms and/or nitrogen compounds and/or hydrocarbons and/or inert noble gases by means of a thermal CVD process at temperatures in the range from 700 DEG C to 1100 DEG C and pressures in the range from 10 Pa to 101.3 kPa without additional plasma excitation, where the molar ratio of the titanium halides to the silicon-containing precursors is selected so that an atomic ratio of Si to Ti of greater than 1 is present in the gas mixture. The process of the invention also permits inexpensive production of such coatings under industrial conditions.

: http://publica.fraunhofer.de/documents/N-310899.html