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At-wavelength metrology on Sc-based multilayers for the VUV and water window
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2003
Conference Paper
Titel
At-wavelength metrology on Sc-based multilayers for the VUV and water window
Author(s)
Schäfers, F.
Yulin, S.
Feigl, T.
Kaiser, N.
Hauptwerk
Advanced characterization techniques for optics, semiconductors, and nanotechnologies
Konferenz
Conference on Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies 2003
Language
English
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Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF