Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Actinic damage of Y/Mo multilayer optics in a table-top plasma-driven x-ray laser

: Bleiner, David; Yulin, Sergiy; Martynczuk, Julia; Ruiz-Lopez, Mabel; Arbelo, Yunieski; Balmer, Jürg E.; Günther, Detlef


Applied optics 53 (2014), No.22, pp.4894-4902
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Journal Article
Fraunhofer IOF ()
UV; EUV; X-ray Lasers; X-ray mirrors; thin films

A Y/Mo multilayer coating, optimized for top reflectivity at ? \'01 12 nm, has been nano-inspected after long-term operation at the in-house soft x-ray laser. The surface and optical inspections were complemented by electron microscopy on cross sections, prepared with focused ion beam technology. A factor of 2.5 loss of reflectivity in the exposed area (ca. 30% relative loss every 100 shots), with concomitant nanoscale photodamage and particle fallout, was found. The x-ray-laser-induced damage extended as deep as 250 nm beneath the surface and as wide as the millimeter spot size.