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Multi-Level MOEMS structures for spatial light modulators

 
: Mirabella, Simone; Friedrichs, Martin; Pufe, Wolfram; List, Matthias

Kızıl, Hüseyin:
MME 2014, 25th Micromechanics and Microsystems Europe Workshop. CD-ROM : August 31 - September 3, 2014, Istanbul, Turkey
Istanbul, 2014
4 pp.
Micromechanics and Microsystems Europe Workshop (MME) <25, 2014, Istanbul>
English
Conference Paper
Fraunhofer IPMS ()

: http://publica.fraunhofer.de/documents/N-309277.html