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Post etch wet clean processes for advanced technology nodes

: Uhlig, Benjamin; Steinke, Philipp; Liske, Romy; Ott, Andreas; Mieth, Oliver

	MAM 2014, Workshop on "Materials for Advanced Metallization". CD-ROM : Held in Chemnitz, Germany, from March 2-5, 2014, Annual Workshop Devoted to Materials Research, Materials Properties and Interactions Chemnitz: Technische Universität Chemnitz, 2014 2 pp.
	Workshop on "Materials for Advanced Metallization" (MAM) <23, 2014, Chemnitz> Workshop Devoted to Materials Research, Materials Properties and Interactions <2014, Chemnitz>

	English
	Conference Paper
	Fraunhofer IPMS ()