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Photonic crystals in lithium niobate by combining focussed ion beam writing and ion-beam enhanced etching

 
: Geiss, Reinhard; Diziain, Séverine; Steinert, Michael; Schrempel, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas; Pertsch, Thomas

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Physica status solidi. A 211 (2014), No.10, pp.2421–2425
ISSN: 0031-8965
ISSN: 1862-6300
ISSN: 1521-396X
ISSN: 1862-6319
English
Journal Article
Fraunhofer IOF ()
focussed ion beam milling; ion etching; lithium niobate; photonic crystals

Abstract
The realization of photonic crystals in self-suspended lithium niobate membranes by means of focussed ion beam writing and ion-beam enhanced etching is presented. The influence of gallium contamination is discussed and considered in the realization of a L3 photonic crystal resonator that is showing the designed linear optical response in a cross-polarization resonant scattering experiment.

: http://publica.fraunhofer.de/documents/N-309156.html