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Surface-micromachined capacitive RF switches with high thermal stability and low drift using Ni as structural material

 
: Lisec, T.; Huth, C.; Shakhray, M.; Wagner, B.; Combi, C.

MEMSWAVE 2004, 5th Workshop on MEMS for MillimeterWAVE Communications : Uppsala University, Uppsala, Sweden 30th June-2nd July, 2004
Uppsala: Nexus, 2004
pp.C33-C36
Workshop on MEMS for MillimeterWAVE Communications (MEMSWAVE) <5, 2004, Uppsala>
English
Conference Paper
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/N-30735.html