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Surface-micromachined capacitive RF switches with high thermal stability and low drift using Ni as structural material
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2004
Conference Paper
Titel
Surface-micromachined capacitive RF switches with high thermal stability and low drift using Ni as structural material
Author(s)
Lisec, T.
Huth, C.
Shakhray, M.
Wagner, B.
Combi, C.
Hauptwerk
MEMSWAVE 2004, 5th Workshop on MEMS for MillimeterWAVE Communications
Konferenz
Workshop on MEMS for MillimeterWAVE Communications (MEMSWAVE) 2004
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT