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Dielectric material impact on capacitive RF MEMS reliability

 
: Lisec, T.; Huth, C.; Wagner, B.

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GAAS 2004. 12th European Gallium Arsenide & other Compound Semiconductors Application Symposium
London: Horizon House, 2004
ISBN: 1-58053-990-4
pp.471-474
European Gallium Arsenide and Other Compound Semiconductors Application Symposium (GAAS) <12, 2004, Amsterdam>
English
Conference Paper, Electronic Publication
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/N-30733.html