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Comparison of different processes for separation of glass and crystals using ultrashort pulsed lasers

: Kumkar, M.; Bauer, L.; Russ, S.; Wendel, M.; Kleiner, J.; Grossmann, D.; Bergner, K.; Nolte, S.


Heisterkamp, A. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Frontiers in Ultrafast Optics. Biomedical, Scientific, and Industrial Applications XIV : February 2014, San Francisco, California, United States
Bellingham, WA: SPIE, 2014 (SPIE Proceedings 8972)
ISBN: 978-0-8194-9885-4
Paper 897214
Conference "Frontiers in Ultrafast Optics - Biomedical, Scientific, and Industrial Applications" <14, 2014, San Francisco/Calif.>
Conference Paper
Fraunhofer IOF ()
ablation; Glass; lasers; materials processing; pump-probe; ultra-short pulse

We investigate cutting of transparent materials using ultra short laser pulses with pulse durations in the sub to a few ps regime. All compared methods base on nonlinear absorption including ablation cutting and cleaving or selective etching supported by laser induced modification inside the bulk material. For most of the experiments samples of hardened glass (Corning Gorilla®) with thickness up to 700 µm were used, ablation cutting of sapphire is presented additionally. Absorption and modification inside the volume is analyzed in detail, aiming for tailored modifications. Besides optical microscopy a pump probe setup was used. We show results of time resolved absorption measurements of 6 ps pulses focused into the volume. We observe shielding due to the interaction region and accumulation effects influencing the modifications. First results on inscribing and cutting by using beam shaping indicate the importance of tailoring the shape and arrangement of the pulses temporally and spatially. The results presented for the different cutting methods supports an assessment of the individual potential and a selection of the applicable method based on the requirements.