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Controlled environments for VOC-sensitive manufacturing processes: From material classification to controlled IAQ in cleanrooms

: Keller, Markus; Gommel, Udo; Verl, Alexander

Fulltext urn:nbn:de:0011-n-3037835 (211 KByte PDF)
MD5 Fingerprint: 934bb8f82df8bd400330d6343287292c
Created on: 26.1.2016

International Society of Indoor Air Quality and Climate -ISIAQ-, Ottawa:
13th International Conference on Indoor Air Quality and Climate 2014. Vol.3 : Proceedings of Indoor Air 2014, Hong Kong, 7-12 July 2014
Red Hook, NY: Curran, 2014
ISBN: 978-1-63439-731-5
International Conference on Indoor Air Quality and Climate <13, 2014, Hong Kong>
Conference Paper, Electronic Publication
Fraunhofer IPA ()
Indoor Air Quality (IAQ); cleanroom; VOC emissions; Airborne Contamination by Chemicals (ACC); Volatile Organic Compounds (VOC); Reinraum; Emission

Materials implemented in controlled environments need to be assessed for VOC emissions and classified in order to permit direct comparisons to be made and to select material without any emission of process critical contaminations, such as phthalates, siloxanes and organophosphates. The newly described method uses a holistic approach. First, emission testing is done using a micro chamber and analysis via thermodesorption coupled with gas chromatography and mass spectrometry. The resulting material classification enables a material selection already in the planning phase of a cleanroom. Then a simulation model for cleanroom settings enables the user to estimate the expected VOC-level of the environment to be constructed depending on the selected materials. Two different cleanroom settings (Space technology and research cleanrooms) were planned and built for low VOC concentration using classified materials depending on their outdoor environment. The final VOC concentration is verified to the prior defined specifications.