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Sputtering
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2014
Book Article
Titel
Sputtering
Author(s)
Bräuer, G.
Hauptwerk
CIRP Encyclopedia of Production Engineering
DOI
10.1007/978-3-642-20617-7_16780
Language
English
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Fraunhofer-Institut fĂ¼r Schicht- und Oberflächentechnik IST