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Handheld micromechanical cantilever mass sensor for early detection of carbon nanoparticles

: Wasisto, H.S.; Merzsch, S.; Uhde, E.; Salthammer, T.; Waag, A.; Peiner, E.

Informationstechnische Gesellschaft -ITG-; VDI/VDE-Gesellschaft Meß- und Automatisierungstechnik -GMA-, Düsseldorf:
Sensoren und Messsysteme 2014. CD-ROM : Beiträge der 17. ITG/GMA-Fachtagung vom 3. bis 4. Juni 2014 in Nürnberg
Berlin: VDE Verlag, 2014 (ITG-Fachberichte 250)
ISBN: 978-3-8007-3622-5
6 pp.
Fachtagung Sensoren und Messsysteme <17, 2014, Nürnberg>
Conference Paper
Fraunhofer WKI ()

This paper describes the first evaluation of development and real-time performance of a low-cost handheld cantileverbased airborne nanoparticle (NP) detector (CANTOR-1). The device is used for direct-reading of exposure to airborne carbon engineered nanoparticles (ENPs) in indoor workplaces. As the main components, a miniaturized electrostatic aerosol sampler and a piezoresistive resonant silicon cantilever mass sensor are employed for collecting the ENPs from the air stream to the cantilever surfaces and measuring their mass concentration, respectively. Moreover, to realize a real-time measurement, a frequency tracking system based on phase-locked loop (PLL) is built and integrated to the device. A long-term ENP exposure and a wet ultrasonic cleaning method are demonstrated to estimate the limitation and extend the operating lifetime of the developed device. By means of the device calibrations performed with a standard ENP monitoring instrument of fast mobility particle sizer (FMPS, TSI 3091), a measurement precision of ENP mass concentration of < 55% and a limit of detection (LOD) of < 25 mug/m(exp 3) are obtained.