Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. High-rate vapor deposition and large systems for coating processes
| Journal of vacuum science and technology A. Vacuum, surfaces and films 5 (1987), No.4, pp.2239-2245
ISSN: 0734-2101 |
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| English |
| Journal Article |
| Fraunhofer FEP () |