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TiN hard coatings deposited on high-speed steel substrates by reactive direct current magnetron sputtering

 
: Schiller, S.; Beister, G.; Reschke, J.; Hötzsch, G.

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Journal of vacuum science and technology A. Vacuum, surfaces and films 5 (1987), No.4, pp.2180-2183
ISSN: 0734-2101
English
Journal Article
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/N-30246.html