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Reactive d.c. high-rate sputtering as production technology

 
: Schiller, S.; Heisig, U.; Korndörfer, C.; Beister, G.; Reschke, J.; Steinfelder, K.; Strümpfel, J.

Krutenat, R.C.:
Metallurgical coatings 1987. Vol.4 : Proceedings of the 14th International Conference on Metallurgical Coatings, San Diego, CA, U.S.A., March 23 - 27, 1987
London: Elsevier Applied Science, 1987 (Surface and coatings technology 33.1987)
ISBN: 1-85166-181-6
ISBN: 1-85166-182-4
pp.405-423
International Conference on Metallurgical Coatings <14, 1987, San Diego/Calif.>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/N-30233.html