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Features of and in situ measurement on absorbing TiOx films produced by reactive D.C. magnetron-plasmatron sputtering
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1980
Journal Article
Titel
Features of and in situ measurement on absorbing TiOx films produced by reactive D.C. magnetron-plasmatron sputtering
Author(s)
Schiller, S.
Beister, G.
Schneider, S.
Sieber, W.
Zeitschrift
Thin solid films
DOI
10.1016/0040-6090(80)90534-9
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP