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On the use of ring gap discharges for high-rate vacuum coating
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1977
Journal Article
Titel
On the use of ring gap discharges for high-rate vacuum coating
Author(s)
Schiller, S.
Heisig, U.
Goedicke, K.
Zeitschrift
Journal of vacuum science and technology
DOI
10.1116/1.569273
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP