Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. On the use of ring gap discharges for high-rate vacuum coating
| Journal of vacuum science and technology 14 (1977), No.3, pp.815-818
ISSN: 0022-5355 |
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| English |
| Journal Article |
| Fraunhofer FEP () |