Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

The physical fundamentals of thin film machining

 
: Schiller, S.; Panzer, S.; Heisig, U.

Bakish, R.:
Electron and ion beam science and technology 1974. Sixth International Conference
Pennington: Electrochemical Society, 1974
pp.412-430
International Conference on Electron and Ion Beam Science and Technology <6, 1974, San Francisco/Calif.>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/N-30200.html