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On the use of a multiple magnetron arrangement for metallization of electronic components at high productivity

 
: Schiller, S.; Heisig, U.; Goedicke, K.; Hartung, J.

:

Krutenat, R.C.:
Metallurgical coatings 1988. Proceedings. Vol.2 : 15th International Conference on Metallurgical Coatings, San Diego, CA, U.S.A., April 11 - 15, 1988
London: Elsevier Applied Science, 1988 (Surface and coatings technology 36.1988,Nr.3-4)
ISBN: 1-85166-984-1
ISBN: 1-85166-986-8
pp.879-892
International Conference on Metallurgical Coatings <15, 1988, San Diego/Calif.>
English
Conference Paper, Journal Article
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/N-30183.html