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Transformer-free semiconductor switches for the energization of a pulsed PVD plasma

 

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Ricard, A. ; European Joint Committee on Plasma and Ion Surface Engineering:
Fifth International Conference on Plasma Surface Engineering 1996. Papers. Pt.2
Amsterdam: Elsevier, 1998 (Surface and coatings technology 98.1998)
pp.1240-1244
International Conference on Plasma Surface Engineering <5, 1996, Garmisch-Partenkirchen>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/N-30179.html